CHARACTERIZATION OF DEFECTS IN REAL SURFACES BY ELLIPSOMETRY

被引：23

作者：

VEDAM, K

机构：

[1] PENN STATE UNIV,MAT RES LAB,UNIVERSITY PK,PA 16802

[2] PENN STATE UNIV,DEPT PHYS,UNIVERSITY PK,PA 16802

来源：

SURFACE SCIENCE | 1976年 / 56卷 / 01期

关键词：

D O I：

10.1016/0039-6028(76)90449-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：221 / 236

页数：16

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