POLARIZATION CHARACTERISTICS OF SCATTERED RADIATION FROM A DIFFRACTION GRATING BY ELLIPSOMETRY WITH APPLICATION TO SURFACE-ROUGHNESS

被引：66

作者：

AZZAM, RMA

BASHARA, NM

机构：

来源：

PHYSICAL REVIEW B | 1972年 / 5卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.5.4721

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

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页码：4721 / &

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共 35 条

[1] ELLIPSOMETRIC MEASUREMENT OF POLARIZATION TRANSFER-FUNCTION OF AN OPTICAL SYSTEM
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (03) : 336 - &
[2] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) : 600 - &
[3] POLARIZATION TRANSFER-FUNCTION OF AN OPTICAL SYSTEM AS A BILINEAR TRANSFORMATION
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (02) : 222 - &
[4] SPECIMEN COHERENT SCATTERING AND COMPENSATOR DEFECTS IN ELLIPSOMETRY
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) : 1236 - &
[5] ELLIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING INCOHERENT EFFECTS
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (10) : 1380 - &
[6] CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) : 1118 - &
[7] GENERAL TREATMENT OF EFFECT OF CELL WINDOWS IN ELLIPSOMETRY
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (06) : 773 - &
[8] AZZAM RMA, 1971, OPT COMMUN, V4, P203
[9] Beckmann P., 1968, DEPOLARISATION ELECT, P76
[10] REFLECTANCE-INCREASING COATINGS FOR THE VACUUM ULTRAVIOLET AND THEIR APPLICATIONS
BERNING, PH
HAAS, G
MADDEN, RP
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1960, 50 (06) : 586 - 597

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