RADIAL ETCH RATE NONUNIFORMITY IN REACTIVE ION ETCHING

被引：23

作者：

NAGY, AG

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 08期

关键词：

D O I：

10.1149/1.2115981

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1871 / 1875

页数：5

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