PHOTOACOUSTIC INFRARED IDENTIFICATION OF N-HN VIBRATIONS IN HYDROGENATED AMORPHOUS-SILICON NITRIDE

被引：4

作者：

BORDELEAU, A

BERTRAND, L

SACHER, E

机构：

来源：

SPECTROCHIMICA ACTA PART A-MOLECULAR AND BIOMOLECULAR SPECTROSCOPY | 1987年 / 43卷 / 09期

关键词：

D O I：

10.1016/0584-8539(87)80042-9

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

引用

页码：1189 / 1190

页数：2

共 10 条

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[7] INVESTIGATIONS OF N-H AND SI-N BONDING CONFIGURATIONS IN HYDROGENATED AMORPHOUS-SILICON NITRIDE FILMS BY INFRARED-ABSORPTION SPECTROSCOPY [J].

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