INVESTIGATIONS OF N-H AND SI-N BONDING CONFIGURATIONS IN HYDROGENATED AMORPHOUS-SILICON NITRIDE FILMS BY INFRARED-ABSORPTION SPECTROSCOPY

被引：50

作者：

NARIKAWA, S

KOJIMA, Y

EHARA, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1985年 / 24卷 / 11期

关键词：

D O I：

10.1143/JJAP.24.L861

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L861 / L863

页数：3

共 10 条

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