CRYSTALLOGRAPHIC POLARITY AND ETCHING BEHAVIOR OF ZNSE

被引:10
作者
EBINA, A [1 ]
ASANO, K [1 ]
TAKAHASHI, T [1 ]
机构
[1] TOHOKU UNIV,RES INST ELECTR COMMUN,SENDAI,MIYAGI 980,JAPAN
关键词
D O I
10.1143/JJAP.16.1563
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:1563 / 1570
页数:8
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