PLASMA PARAMETERS OF A RADIO-FREQUENCY DISCHARGE

被引：9

作者：

ANDERSON, CA

HOPKINS, MB

GRAHAM, WG

机构：

[1] DUBLIN CITY UNIV,DEPT PHYS,DUBLIN,IRELAND

[2] QUEENS UNIV BELFAST,DEPT PHYS,BELFAST BT7 1NN,ANTRIM,NORTH IRELAND

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期

关键词：

D O I：

10.1063/1.1141269

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A low-frequency (100 kHz) radio frequency discharge has been characterized by making time-resolved measurements of the basic plasma parameters, including the electron energy-distribution function. Measurements obtained when operating with H2, D2, and Ar are compared. Surprisingly low electron temperatures (∼0.2 eV) have been found in H2 and D 2 discharges.

引用

收藏

页码：448 / 450

页数：3

相关论文

共 8 条

[1] TIME-RESOLVED PLASMA PARAMETER MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE [J].

ANDERSON, CA ;

GRAHAM, WG ;

HOPKINS, MB .

APPLIED PHYSICS LETTERS, 1988, 52 (10) :783-785

[2] PRESSURE AND ELECTRON-TEMPERATURE DEPENDENCE OF H- DENSITY IN A HYDROGEN PLASMA [J].

BACAL, M ;

BRUNETEAU, AM ;

GRAHAM, WG ;

HAMILTON, GW ;

NACHMAN, M .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (03) :1247-1254

[3] THE USE OF LANGMUIR PROBES AND OPTICAL-EMISSION SPECTROSCOPY TO MEASURE ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN RF-GENERATED ARGON PLASMAS [J].

COX, TI ;

DESHMUKH, VGI ;

HOPE, DAO ;

HYDES, AJ ;

BRAITHWAITE, NS ;

BENJAMIN, NMP .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1987, 20 (07) :820-831

[4] LANGMUIR PROBE TECHNIQUE FOR PLASMA PARAMETER MEASUREMENT IN A MEDIUM DENSITY DISCHARGE [J].

HOPKINS, MB ;

GRAHAM, WG .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (09) :2210-2217

[5] TIME-RESOLVED ELECTRON-ENERGY DISTRIBUTION FUNCTION MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE [J].

HOPKINS, MB ;

ANDERSON, CA ;

GRAHAM, WG .

EUROPHYSICS LETTERS, 1989, 8 (02) :141-145

[6] A KINETIC-STUDY OF THE PLASMA-ETCHING PROCESS .2. PROBE MEASUREMENTS OF ELECTRON PROPERTIES IN AN RF PLASMA-ETCHING REACTOR [J].

KUSHNER, MJ .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (04) :2939-2946

[7]

Laframboise J. G., 1966, 100 U TOR I AER STUD

[8]

MAUDRILL D, 1987, J PHYS D, V20, P815