SPUTTERING OF METALS IN PRESENCE OF REACTIVE GASES

被引：39

作者：

HRBEK, J ^{[1
]}

机构：

[1] CZECHOSLOVAK ACAD SCI, J HEYROVSKY INST PHYS CHEM & ELECTROCHEM, CS-12138 PRAHA 2, CZECHOSLOVAKIA

来源：

THIN SOLID FILMS | 1977年 / 42卷 / 02期

关键词：

D O I：

10.1016/0040-6090(77)90416-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：185 / 191

页数：7

共 25 条

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[2]

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[4]

Bernheim M., 1973, International Journal of Mass Spectrometry and Ion Physics, V12, P93, DOI 10.1016/0020-7381(73)80090-7

[5] ADSORPTION OF GASES STUDIED BY SECONDARY ION EMISSION MASS-SPECTROMETRY [J].

BLAISE, G ;

BERNHEIM, M .

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[6]

CANTAGREL M, 1973, J MATER SCI, V8, P1711, DOI 10.1007/BF02403521

[7]

CORBEK CJ, 1933, J OPT SOC AM, V23, P109

[8] FORMATION OF CONES DURING SPUTTERING [J].

GVOSDOVER, RS ;

EFREMENKOVA, VM ;

SHELYAKIN, LB ;

YURASOVA, VE .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1976, 27 (3-4) :237-244

[9]

Hayward DO., 1964, CHEMISORPTION

[10] REACTIVE SPUTTERING OF METALS IN OXIDIZING ATMOSPHERES [J].

HELLER, J .

THIN SOLID FILMS, 1973, 7 (02) :163-176

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