DIFFRACTION AND SCATTERING BY LAMELLAR AMPLITUDE MULTILAYER GRATINGS IN THE X-UV REGION

被引：32

作者：

SAMMAR, A ^{[1
]}

ANDRE, JM ^{[1
]}

PARDO, B ^{[1
]}

机构：

[1] UNIV PARIS 11,INST OPT THEOR & APPL,F-91405 ORSAY,FRANCE

来源：

OPTICS COMMUNICATIONS | 1991年 / 86卷 / 02期

关键词：

D O I：

10.1016/0030-4018(91)90566-V

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A dynamical theory is given to calculate the diffraction efficiencies of lamellar amplitude multilayer gratings (LAMGs). The model is applied to the LAMGs recently realized for the X-UV region. The unique diffraction properties of these devices are discussed. Roughness-induced scattering effects resulting from the pattern in relief of the grating are predicted and evaluated.

引用

页码：245 / 254

页数：10

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