MASS-SPECTROMETRIC STUDIES OF IMPURITIES IN SILANE AND THEIR EFFECTS ON THE ELECTRONIC-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON

被引：12

作者：

CORDERMAN, RR

VANIER, PE

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 07期

关键词：

D O I：

10.1063/1.332577

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3987 / 3992

页数：6

相关论文

共 31 条

[1] MASS-SPECTRA OF SILICON CONTAINING INDUSTRIAL GASES
BAN, VS
[J]. MATERIALS RESEARCH BULLETIN, 1975, 10 (02) : 81 - 83
[2] FREE-RADICAL CHAIN FORMATION OF SILOXANES IN RADIOLYSIS OF MONOSILANE NITRIC OXIDE MIXTURES
BARE, JP
LAMPE, FW
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1977, 81 (15) : 1437 - 1441
[3] BAZANT V, 1965, ORGANOSILICON COMPOU, P124
[4] STUDY OF FRAGMENTATION PATTERNS BY BEAM MODULATION MASS SPECTROMETRY
BOYER, MH
MURAD, E
INAMI, YH
HILDENBR.DL
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1968, 39 (01) : 26 - &
[5] AMORPHOUS THIN-FILMS FOR TERRESTRIAL SOLAR-CELLS
CARLSON, DE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 290 - 295
[6] CARLSON DE, 1979, TOP APPL PHYS, V36, P310
[7] DISORDER AND THE OPTICAL-ABSORPTION EDGE OF HYDROGENATED AMORPHOUS-SILICON
CODY, GD
TIEDJE, T
ABELES, B
BROOKS, B
GOLDSTEIN, Y
[J]. PHYSICAL REVIEW LETTERS, 1981, 47 (20) : 1480 - 1483
[8] IMPURITY EFFECTS IN A-SI-H SOLAR-CELLS DUE TO AIR, OXYGEN, NITROGEN, PHOSPHINE, OR MONOCHLOROSILANE IN THE PLASMA
DELAHOY, AE
GRIFFITH, RW
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (10) : 6337 - 6346
[9] EFFECTS OF MONOCHLOROSILANE ON THE PROPERTIES OF PLASMA DEPOSITED HYDROGENATED AMORPHOUS-SILICON
DELAHOY, AE
GRIFFITH, RW
KAMPAS, FJ
VANIER, PE
[J]. JOURNAL OF ELECTRONIC MATERIALS, 1982, 11 (05) : 869 - 882
[10] DETECTION OF RADICALS AND EXCITED MOLECULES IN DYNAMIC-SYSTEMS
FITE, WL
[J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1975, 16 (1-2): : 109 - 124

← 1 2 3 4 →