QUANTITATIVE AES AND XPS INVESTIGATION OF MAGNETRON SPUTTERED TINX FILMS

被引:27
作者
BENDER, H
PORTILLO, J
VANDERVORST, W
机构
关键词
D O I
10.1002/sia.740140610
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 [物理化学]; 081704 [应用化学];
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页码:337 / 346
页数:10
相关论文
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