AEROSOL DOPING OF FLAME-GROWN DIAMOND FILMS

被引:6
作者
DOVERSPIKE, K [1 ]
BUTLER, JE [1 ]
FREITAS, JA [1 ]
机构
[1] SACHS FREEMAN ASSOCIATES INC,LANDOVER,MD 20785
关键词
D O I
10.1016/0925-9635(93)90276-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond films have been deposited using a pre-mixed oxy-acetylene flame onto cooled substrates. Doping of these flame-grown diamond films was achieved by introducing aerosol droplets containing the dopant species into the gas flow. The aerosol was generated by a commercial atomizer and was entrained into the oxygen flow before the flame front leading to a uniform and reproducible flame. Micro-Raman measurements show a decrease in the background fluorescence of the boron-doped films as compared with samples containing other dopants. In addition, low-temperature photoluminescence measurements of both the boron- and silicon-doped films show a significant decrease in the defect bands associated with nitrogen vacancy complexes that are often observed in flame-grown diamond films. The boron-doped diamond samples were also characterized by photoluminescence using the UV 351 nm laser line of an argon ion laser and show both green and/or blue emission.
引用
收藏
页码:1078 / 1082
页数:5
相关论文
共 27 条
[1]   CALORIMETRIC ABSORPTION-SPECTROSCOPY AND PHOTOLUMINESCENCE STUDY OF DEFECTS IN DIAMOND [J].
BILODEAU, TG ;
DOVERSPIKE, K ;
STROM, U ;
FREITAS, JA ;
RAMESHAN, R .
DIAMOND AND RELATED MATERIALS, 1993, 2 (5-7) :699-703
[2]   AN INVESTIGATION OF DIAMOND FILM DEPOSITION IN A PREMIXED OXYACETYLENE FLAME [J].
CAPPELLI, MA ;
PAUL, PH .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (05) :2596-2602
[3]   DIAMOND GROWTH IN O-2 + C2H4 AND O2 + C2H2 FLAMES [J].
CARRINGTON, WA ;
HANSSEN, LM ;
SNAIL, KA ;
OAKES, DB ;
BUTLER, JE .
METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1989, 20 (07) :1282-1284
[4]   RAMAN AND PHOTOLUMINESCENCE SPECTRA OF AS-GROWN CVD DIAMOND FILMS [J].
CLARK, CD ;
DICKERSON, CB .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1992, 4 (03) :869-878
[5]  
COLLINS AT, 1990, MATER RES SOC SYMP P, V162, P225
[6]  
COLLINS AT, 1991, 2ND P INT S DIAM MAT, P408
[7]  
Collins AT, 1979, PROPERTIES DIAMOND, P79
[8]   BOUND EXCITONS AND DONOR-ACCEPTOR PAIRS IN NATURAL AND SYNTHETIC DIAMOND [J].
DEAN, PJ .
PHYSICAL REVIEW, 1965, 139 (2A) :A588-&
[9]  
DOVERSPIKE K, 1991, MATER RES SOC S P, V242, P37
[10]   PHOTOLUMINESCENCE AND CATHODOLUMINESCENCE STUDIES OF SEMICONDUCTING DIAMOND [J].
FREITAS, JA ;
STROM, U ;
COLLINS, AT .
DIAMOND AND RELATED MATERIALS, 1993, 2 (2-4) :87-91