APPLICATIONS OF A SEMICONDUCTOR BACKSCATTERED ELECTRON DETECTOR IN A SCANNING ELECTRON-MICROSCOPE

被引：20

作者：

STEPHEN, J ^{[1
]}

SMITH, BJ ^{[1
]}

MARSHALL, DC ^{[1
]}

WITTAM, EM ^{[1
]}

机构：

[1] ATOM ENERGY RES ESTAB,ELECTR & APPL PHYS DIV,HARWELL OX11 0RA,OXFORDSHIRE,ENGLAND

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1975年 / 8卷 / 07期

关键词：

D O I：

10.1088/0022-3735/8/7/021

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：607 / 610

页数：4

共 7 条

[1]

BISHOP HE, 1965, 4TH INT C XRAY OPT M, P153

COATES, DG .

PHILOSOPHICAL MAGAZINE, 1967, 16 (144) :1179-&

[3]

FREEMAN JH, 1970, R6496 AERE HARW REP

[4] SILICON DETECTOR FOR STEREOSCAN SCANNING ELECTRON-MICROSCOPE [J].

MUNDEN, AB ;

WALKER, DEY .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1973, 6 (09) :916-920

ROBINSON, VN .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1974, 7 (08) :650-652

[6]

Thornton P.R., 1968, SCANNING ELECTRON MI, P85

[7]

WOLF ED, 1969, 2ND P SEM S CHIC