REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION MEASUREMENTS OF ALGAAS GROWTH INSTABILITIES AND ROUGHENING RATES ON MISORIENTED SUBSTRATES

被引：6

作者：

SALUJA, D

PUKITE, PR

BATRA, S

COHEN, PI

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 03期

关键词：

D O I：

10.1116/1.583813

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：710 / 711

页数：2

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