A NOVEL SCANNING TUNNELING MICROSCOPE CONTROLLED FIELD-EMISSION MICROLENS ELECTRON SOURCE

被引：14

作者：

MCCORD, MA

CHANG, THP

KERN, DP

SPEIDELL, JL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.584679

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1851 / 1854

页数：4

共 14 条

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06) :2023-2027

[10] QUANTITATIVE-ANALYSIS OF RESOLUTION AND STABILITY IN NANOMETER ELECTRON-BEAM LITHOGRAPHY [J].

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