ON A THERMODYNAMIC APPROACH TO THE CHEMICAL PHENOMENA INVOLVED IN THE FORMATION OF A BN INTERPHASE BY CVD CVI FROM A BF3-NH3 PRECURSOR

被引:21
作者
DUGNE, O [1 ]
PROUHET, S [1 ]
GUETTE, A [1 ]
NASLAIN, R [1 ]
BERNARD, C [1 ]
机构
[1] ECOLE NATL SUPER ELECTROCHIM & ELECTROMET GRENOBLE,INPG,THERMODYNAM & PHYSICOCHIM MET LAB,CNRS,F-38401 ST MARTIN DHERES,FRANCE
关键词
D O I
10.1016/0925-8388(91)90027-S
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The chemical phenomena involved in the CVD/CVI of BN from BF3-NH3 mixtures are studied through thermodynamic calculations based on a computer minimization of the total Gibbs free energy of the system for 1123 < T < 1723, P = 0.1, 1 and 10 kPa, and 0.1 < alpha = [NH3]in./[BF3]in. < 15. Various substrate materials, i.e. a purely inert substrate, C, SiC, SiO2 and SiC-SiO2 thought to simulate the substrates onto the BN interphase is actually deposited in SiC (ex-PCS) fiber preforms, are considered. C and SiO2 are quasi-unreactive whereas SiC-based materials are reactive vs. compared with the gas phase. For the former, the BF3/BN conversion yield is low owing to the stability of BF3. For the latter, it is almost equal to 100% owing to chemical attack of the substrate, but the deposit is a mixture of BN + C and even of BN + C + Si3N4 (or/and Si2N2O) for the NH3-rich precursors. The effects of temperature and pressure on the BN yield and substrate attack are studied as well as that of a contamination of the gas phase by oxygen. It is foreseen that a preform made of SiC (ex-PCS) fibers will not be significantly damaged either chemically or mechanically during the infiltration of a BN interphase from BF3-NH3 if the fiber surface is assumed to be coated uniformly with C, SiO2 or C + SiO2.
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页码:187 / 213
页数:27
相关论文
共 38 条
[1]   PREPARATION, PROPERTIES AND APPLICATIONS OF BORON-NITRIDE THIN-FILMS [J].
ARYA, SPS ;
DAMICO, A .
THIN SOLID FILMS, 1988, 157 (02) :267-282
[2]  
BENDER B, 1986, AM CERAM SOC BULL, V65, P363
[3]  
Benson P.M, 1988, CERAM ENG SCI P, V9, P663
[4]  
BERNARD C, 1988, COMMUNICATION
[5]   A METHOD FOR RAPID CHEMICAL VAPOR INFILTRATION OF CERAMIC COMPOSITES [J].
BESMANN, TM ;
LOWDEN, RA ;
STINTON, DP ;
STARR, TL .
JOURNAL DE PHYSIQUE, 1989, 50 (C-5) :229-239
[7]  
BOUILLON E, UNPUB J MATER SCI
[8]   STRUCTURE AND CHEMISTRY OF FIBER MATRIX INTERFACES IN SILICON-CARBIDE FIBER-REINFORCED GLASS CERAMIC COMPOSITES - AN ELECTRON-MICROSCOPY STUDY [J].
COOPER, RF ;
CHYUNG, K .
JOURNAL OF MATERIALS SCIENCE, 1987, 22 (09) :3148-3160
[9]   AES, XPS AND TEM CHARACTERIZATION OF BORON-NITRIDE DEPOSITED UNDER CHEMICAL VAPOR INFILTRATION (CVI) CONDITIONS [J].
DUGNE, O ;
PROUHET, S ;
GUETTE, A ;
NASLAIN, R ;
FOURMEAUX, R ;
HSSEIN, K ;
SEVELY, J ;
GUIMON, C ;
GONBEAU, D ;
PFISTERGUILLOUZO, G .
JOURNAL DE PHYSIQUE, 1989, 50 (C-5) :333-341
[10]  
DUGNE O, 1989, 1989 P ECCM 3 BORD, P129