CHARACTERIZATION OF VAPOR-PHASE GROWTH USING X-RAY TECHNIQUES

被引：21

作者：

KISKER, DW

STEPHENSON, GB

FUOSS, PH

BRENNAN, S

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

[2] STANFORD SYNCHROTRON RADIAT LAB,MENLO PK,CA 94025

来源：

JOURNAL OF CRYSTAL GROWTH | 1995年 / 146卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(94)00588-5

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Chemical vapor deposition environments, while technologically quite important, are difficult to study using traditional analytical probes, such as electron-based techniques and optical tools. In this work, we will describe some of the ways in which X-rays can be applied to understand not only the gas phase composition through fluorescence, but also surface processes such as nucleation and diffusion.

引用

收藏

页码：104 / 111

页数：8

相关论文

共 16 条

[1] OPTICAL-REFLECTANCE AND ELECTRON-DIFFRACTION STUDIES OF MOLECULAR-BEAM-EPITAXY GROWTH TRANSIENTS ON GAAS(001) [J].

ASPNES, DE ;

HARBISON, JP ;

STUDNA, AA ;

FLOREZ, LT .

PHYSICAL REVIEW LETTERS, 1987, 59 (15) :1687-1690

[2] EXPERIMENTAL CONSIDERATIONS FOR INSITU X-RAY-SCATTERING ANALYSIS OF OMVPE GROWTH [J].

BRENNAN, S ;

FUOSS, PH ;

KAHN, JL ;

KISKER, DW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 291 (1-2) :86-92

[3] TIME-RESOLVED X-RAY-SCATTERING STUDIES OF LAYER-BY-LAYER EPITAXIAL-GROWTH [J].

FUOSS, PH ;

KISKER, DW ;

LAMELAS, FJ ;

STEPHENSON, GB ;

IMPERATORI, P ;

BRENNAN, S .

PHYSICAL REVIEW LETTERS, 1992, 69 (19) :2791-2794

[4] ATOMIC NATURE OF ORGANOMETALLIC-VAPOR-PHASE-EPITAXIAL GROWTH [J].

FUOSS, PH ;

KISKER, DW ;

RENAUD, G ;

TOKUDA, KL ;

BRENNAN, S ;

KAHN, JL .

PHYSICAL REVIEW LETTERS, 1989, 63 (21) :2389-2392

[5]

Guinier G., 1955, SMALL ANGLE SCATTERI

[6]

IRISAWA T, 1990, J CRYST GROWTH, V90, P491

[7] ATOMIC SCALE CHARACTERIZATION OF ORGANOMETALLIC VAPOR-PHASE EPITAXIAL-GROWTH USING INSITU GRAZING-INCIDENCE X-RAY-SCATTERING [J].

KISKER, DW ;

STEPHENSON, GB ;

FUOSS, PH ;

LAMELAS, FJ ;

BRENNAN, S ;

IMPERATORI, P .

JOURNAL OF CRYSTAL GROWTH, 1992, 124 (1-4) :1-9

[8] X-RAY-ANALYSIS OF GAAS SURFACE RECONSTRUCTIONS IN H2 AND N2 ATMOSPHERES [J].

KISKER, DW ;

FUOSS, PH ;

TOKUDA, KL ;

RENAUD, G ;

BRENNAN, S ;

KAHN, JL .

APPLIED PHYSICS LETTERS, 1990, 56 (20) :2025-2027

[9] INSITU CHARACTERIZATION OF ORGANOMETALLIC GROWTH OF ZNSE USING GRAZING-INCIDENCE X-RAY-SCATTERING [J].

KISKER, DW ;

FUOSS, PH ;

BRENNAN, S ;

RENAUD, G ;

TOKUDA, KL ;

KAHN, JL .

JOURNAL OF CRYSTAL GROWTH, 1990, 101 (1-4) :42-47

[10] GALLIUM-ARSENIDE SURFACE RECONSTRUCTIONS DURING ORGANOMETALLIC VAPOR-PHASE EPITAXY [J].

LAMELAS, FJ ;

FUOSS, PH ;

IMPERATORI, P ;

KISKER, DW ;

STEPHENSON, GB ;

BRENNAN, S .

APPLIED PHYSICS LETTERS, 1992, 60 (21) :2610-2612