共 9 条
[2]
ALLEY GD, 1982 DEV RES C FT CO
[4]
BOZLER CO, 1978, 7TH P INT S GAAS REL, P429
[5]
BOZLER CO, 1979, 7TH P BIEN CORN C AC, P33
[7]
LARGE AREA ION-BEAM ASSISTED ETCHING OF GAAS WITH HIGH ETCH RATES AND CONTROLLED ANISOTROPY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1983, 1 (04)
:1043-1046