ANODIC OXIDE FILMS FOR DEVICE FABRICATION IN SILICON .1. THE CONTROL LED INCORPORATION OF PHOSPHORUS INTO ANODIC OXIDE FILMS ON SILICON

被引：71

作者：

SCHMIDT, PF

OWEN, AE

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1964年 / 111卷 / 06期

关键词：

D O I：

10.1149/1.2426210

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：682 / 688

页数：7

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