THERMAL-STABILITY OF MULTILAYER FILMS PT/SI, W/SI, MO/SI, AND W/C

被引:72
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JIANG, ZM
JIANG, XM
LIU, WH
WU, ZQ
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10.1063/1.342569
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O59 [应用物理学];
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页码:196 / 200
页数:5
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[1]  
BRAUNSTEIN G, 1984, 1983 MRS S ION IMPL, V27, P475
[2]   THE EFFECT OF INTERFACE ROUGHNESS ON THE INTENSITY PROFILES OF BRAGG PEAKS FROM SUPERLATTICES [J].
CHRZAN, D ;
DUTTA, P .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (05) :1504-1507
[3]  
JIANG X, IN PRESS ACTA PHYS S
[4]  
Jiang Xiaoming, 1986, Chinese Physics Letters, V3, P569, DOI 10.1088/0256-307X/3/12/011
[5]   ANOMALOUS EXPANSION OF TUNGSTEN-CARBON MULTILAYERS USED IN X-RAY OPTICS [J].
LEPETRE, Y ;
ZIEGLER, E ;
SCHULLER, IK ;
RIVOIRA, R .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (07) :2301-2303
[6]  
LU JB, IN PRESS ACTA PHYS S
[7]   MICROSTRUCTURAL INVESTIGATIONS OF REFRACTORY-METAL SILICIDE FILMS ON SILICON [J].
MAGEE, TJ ;
WOOLHOUSE, GR ;
KAWAYOSHI, HA ;
NIEMEYER, IC ;
RODRIGUES, B ;
ORMOND, RD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04) :756-761
[8]   1ST-ORDER AND 2ND-ORDER RAMAN-SCATTERING FROM FINITE-SIZE CRYSTALS OF GRAPHITE [J].
NEMANICH, RJ ;
SOLIN, SA .
PHYSICAL REVIEW B, 1979, 20 (02) :392-401
[9]  
ONG CK, 1985, MATER RES SOC S P, V35, P239
[10]   RAMAN-SCATTERING FROM EXTREMELY THIN HARD AMORPHOUS-CARBON FILMS [J].
RAMSTEINER, M ;
WAGNER, J ;
WILD, C ;
KOIDL, P .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (02) :729-731