SURFACE-SELECTIVE DEPOSITION OF PALLADIUM AND SILVER FILMS FROM METAL-ORGANIC PRECURSORS - A NOVEL METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION REDOX TRANSMETALATION PROCESS

被引:115
作者
LIN, WB
WARREN, TH
NUZZO, RG
GIROLAMI, GS
机构
[1] UNIV ILLINOIS,SCH CHEM SCI,DEPT MAT SCI & ENGN,URBANA,IL 61801
[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
关键词
D O I
10.1021/ja00077a092
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
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页码:11644 / 11645
页数:2
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