MONTE-CARLO SIMULATION OF THERMALIZATION PROCESS OF SPUTTERED PARTICLES

被引：26

作者：

MOTOHIRO, T

TAGA, Y

机构：

来源：

SURFACE SCIENCE | 1983年 / 134卷 / 01期

关键词：

D O I：

10.1016/0039-6028(83)90304-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：L494 / L499

页数：6

共 13 条

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