HIGH-SPEED PRECISION X-Y-STAGE

被引：6

作者：

REEDS, J ^{[1
]}

HANSEN, S ^{[1
]}

OTTO, O ^{[1
]}

CARROLL, AM ^{[1
]}

MCCARTHY, DJ ^{[1
]}

RADLEY, J ^{[1
]}

机构：

[1] PERKIN ELMER CORP,HAYWARD,CA 94545

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 01期

关键词：

D O I：

10.1116/1.583190

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：112 / 116

页数：5

共 5 条

[1] EIDSON JC, 1981, PRECISION HIGH SPEED, P3
[2] DIGITALLY POSITIONED MECHANICAL STAGE
PASIECZNIK, J
REEDS, JW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03): : 909 - 912
[3] ADVANCES IN HIGH-PRECISION SAMPLE POSITIONING STAGES FOR ELECTRON-BEAM MICROFABRICATION AND METROLOGY
PASIECZNIK, J
REEDS, JW
FRALICK, RD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1815 - 1818
[4] HIGH-SPEED, LOW-OVERHEAD ELECTRON-BEAM DIRECT SLICE WRITING SYSTEM
VARNELL, GL
SPICER, DF
HEBLEY, J
ROBBINS, R
CARPENTER, C
MALONE, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1787 - 1793
[5] VIBRATION ANALYSIS USING THE STRIPE SCAN METHOD OF A LASER INTERFEROMETER CONTROLLED X-Y TABLE IN AN ELECTRON-BEAM SYSTEM
WILSON, AD
STUDWELL, T
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1819 - 1823