HIGH-RESOLUTION ELECTRON-MICROSCOPIC AND SPECTROSCOPIC CHARACTERIZATION OF SEMIINSULATING POLYCRYSTALLINE SILICON AND ITS INTERFACE WITH SINGLE-CRYSTAL SILICON

被引：39

作者：

WONG, J

JEFFERSON, DA

SPARROW, TG

THOMAS, JM

MILNE, RH

HOWIE, A

KOCH, EF

机构：

[1] UNIV CAMBRIDGE,CAVENDISH LAB,DEPT PHYS,CAMBRIDGE CB3 0HE,ENGLAND

[2] GE,CORP RES & DEV,SCHENECTADY,NY 12301

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 01期

关键词：

D O I：

10.1063/1.96763

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：65 / 67

页数：3

共 17 条

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