AN OPTICAL CHARACTERIZATION OF NATIVE OXIDES AND THIN THERMAL OXIDES ON SILICON

被引：46

作者：

PHILIPP, HR

TAFT, EA

机构：

来源：

关键词：

D O I：

10.1063/1.331401

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5224 / 5229

页数：6

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[10] OPTICAL PROPERTIES OF NON-CRYSTALLINE SI, SIO, SIOX AND SIO2 [J].

PHILIPP, HR .