CHARACTERIZATION OF HARD NITRIDE AND CARBIDE TITANIUM AND ZIRCONIUM COATINGS ON HIGH-SPEED STEEL CUTTING-TOOL INSERTS

被引:16
作者
FENSKE, G
KAUFHERR, N
ALBERTSON, C
MAPALO, G
NIELSEN, R
KAMINSKY, M
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期
关键词
D O I
10.1116/1.573652
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2879 / 2884
页数:6
相关论文
共 11 条
[1]   THE ACTIVATED REACTIVE EVAPORATION PROCESS - DEVELOPMENTS AND APPLICATIONS [J].
BUNSHAH, RF .
THIN SOLID FILMS, 1981, 80 (1-3) :255-261
[2]   EFFECT OF SUBSTRATE-TEMPERATURE CONTROL DURING DEPOSITION ON THE ADHERENCE OF ION-PLATED TITANIUM CARBIDE AND VANADIUM CARBIDE FILMS ON MOLYBDENUM [J].
FUKUTOMI, M ;
FUJITSUKA, M ;
KITAJIMA, M ;
SHIKAMA, T ;
OKADA, M .
THIN SOLID FILMS, 1981, 80 (1-3) :271-277
[3]   THE FORMATION OF OUTGROWTHS IN CO-EVAPORATED NI-AL FILMS [J].
HENTZELL, HTG ;
ANDERSSON, B ;
KARLSSON, SE .
THIN SOLID FILMS, 1981, 85 (3-4) :277-283
[4]  
KRAMER B, 1986, 13TH INT C MET COAT
[5]   COMPUTATIONAL DESIGN OF WEAR COATINGS [J].
KRAMER, BM ;
JUDD, PK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2439-2444
[6]  
ROSEN GA, 1980, TOOL STEELS, P640
[7]  
SPROUL W, 1986, 13TH INT C MET COAT
[8]   MECHANISMS OF REACTIVE SPUTTERING OF TITANIUM NITRIDE AND TITANIUM CARBIDE .3. INFLUENCE OF SUBSTRATE BIAS ON COMPOSITION AND STRUCTURE [J].
SUNDGREN, JE ;
JOHANSSON, BO ;
HENTZELL, HTG ;
KARLSSON, SE .
THIN SOLID FILMS, 1983, 105 (04) :385-393
[9]   MECHANISMS OF REACTIVE SPUTTERING OF TITANIUM NITRIDE AND TITANIUM CARBIDE .1. INFLUENCE OF PROCESS PARAMETERS ON FILM COMPOSITION [J].
SUNDGREN, JE ;
JOHANSSON, BO ;
KARLSSON, SE .
THIN SOLID FILMS, 1983, 105 (04) :353-366
[10]   MECHANISMS OF REACTIVE SPUTTERING OF TITANIUM NITRIDE AND TITANIUM CARBIDE .2. MORPHOLOGY AND STRUCTURE [J].
SUNDGREN, JE ;
JOHANSSON, BO ;
KARLSSON, SE ;
HENTZELL, HTG .
THIN SOLID FILMS, 1983, 105 (04) :367-384