MECHANISMS OF REACTIVE SPUTTERING OF TITANIUM NITRIDE AND TITANIUM CARBIDE .1. INFLUENCE OF PROCESS PARAMETERS ON FILM COMPOSITION

被引：195

作者：

SUNDGREN, JE

JOHANSSON, BO

KARLSSON, SE

机构：

来源：

THIN SOLID FILMS | 1983年 / 105卷 / 04期

关键词：

D O I：

10.1016/0040-6090(83)90318-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：353 / 366

页数：14

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