CATHODOLUMINESCENCE SPECTROSCOPY STUDIES OF LASER-ANNEALED METAL-SEMICONDUCTOR INTERFACES

被引：23

作者：

BRILLSON, LJ

RICHTER, HW

SLADE, ML

WEINSTEIN, BA

SHAPIRA, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573110

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：1011 / 1015

页数：5

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