WAVE-GUIDING EFFECTS IN LASER-INDUCED AQUEOUS ETCHING OF SEMICONDUCTORS

被引：42

作者：

PODLESNIK, DV ^{[1
]}

GILGEN, HH ^{[1
]}

OSGOOD, RM ^{[1
]}

机构：

[1] COLUMBIA UNIV,COLUMBIA RADIAT LAB,NEW YORK,NY 10027

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 07期

关键词：

D O I：

10.1063/1.96487

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

SEMICONDUCTING GALLIUM ARSENIDE

引用

页码：496 / 498

页数：3

共 9 条

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[9] VERTICAL CHANNEL FIELD-CONTROLLED THYRISTORS WITH HIGH-GAIN AND FAST SWITCHING SPEEDS [J].

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