EVIDENCE FOR FACETS WITH (210) AZIMUTH IN MOLECULAR-BEAM EPITAXIAL-GROWTH ON PATTERNED GAAS(001) SUBSTRATES

被引:3
作者
BENISTY, H
BOCKENHOFF, E
TALNEAU, A
机构
[1] Laboratoire Central de Recherches, Thomson-CSF, F-91404 Orsay, Domaine de Corbeville
关键词
D O I
10.1063/1.107120
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present clear experimental evidence that using axes different from the <110> mirror axes of the (001) GaAs surface generally used for lateral patterning and regrowth of nanostructures yield much better faceted morphologies in molecular-beam epitaxy (MBE) at such scales. Growth on [210] and [120BAR] oriented gratings is shown to yield almost perfect (21n) facets (n almost-equal-to 6). A novel directed one-dimensional growth instability is clearly revealed. The microscopic structure of these facets is discussed as well as implications for the growth of quantum wires and dots in the (In,Ga,Al)As system.
引用
收藏
页码:1987 / 1989
页数:3
相关论文
共 27 条
[1]   CHARACTERIZATION OF SURFACE FACETING ON (110)GAAS/GAAS GROWN BY MOLECULAR-BEAM EPITAXY [J].
ALLEN, LTP ;
WEBER, ER ;
WASHBURN, J ;
PAO, YC ;
ELLIOT, AG .
JOURNAL OF CRYSTAL GROWTH, 1988, 87 (2-3) :193-200
[2]   EVOLUTION OF 3D GROWTH-PATTERNS ON NONPLANAR SUBSTRATES [J].
BOCKENHOFF, E ;
BENISTY, H .
JOURNAL OF CRYSTAL GROWTH, 1991, 114 (04) :619-632
[3]   ATOMIC-STRUCTURE OF GAAS(100)-(2X1) AND GAAS(100)-(2X4) RECONSTRUCTED SURFACES [J].
CHADI, DJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :834-837
[4]  
CHADI DJ, 1989, PHYS REV B, V40, P10481
[5]   INTEGRATED EXTERNAL CAVITY QUANTUM WELL LASER ARRAY USING SINGLE EPITAXIAL-GROWTH ON A PATTERNED SUBSTRATE [J].
CHANGHASNAIN, CJ ;
KAPON, E ;
HARBISON, JP ;
FLOREZ, LT .
APPLIED PHYSICS LETTERS, 1990, 56 (05) :429-431
[6]   FREE SURFACES AND MULTILAYER INTERFACES IN THE GAAS/ALAS SYSTEM [J].
CHOI, DK ;
TAKAI, T ;
ERKOC, S ;
HALICIOGLU, T ;
TILLER, WA .
JOURNAL OF CRYSTAL GROWTH, 1987, 85 (1-2) :9-15
[7]   CATHODOLUMINESCENCE IMAGING OF PATTERNED QUANTUM WELL HETEROSTRUCTURES GROWN ON NONPLANAR SUBSTRATES BY MOLECULAR-BEAM EPITAXY [J].
CLAUSEN, EM ;
KAPON, E ;
TAMARGO, MC ;
HWANG, DM .
APPLIED PHYSICS LETTERS, 1990, 56 (08) :776-778
[8]   DIFFUSION-ENHANCED EPITAXIAL-GROWTH OF THICKNESS-MODULATED LOW-LOSS RIB WAVE-GUIDES ON PATTERNED GAAS SUBSTRATES [J].
COLAS, E ;
SHAHAR, A ;
TOMLINSON, WJ .
APPLIED PHYSICS LETTERS, 1990, 56 (10) :955-957
[9]  
FUKUI T, 1990, JPN J APPL PHYS, V29, P731
[10]   SELECTIVE GROWTH AND OPTICAL-PROPERTIES OF AN ALGAAS LAYER ON V-GROOVED SI SUBSTRATES [J].
HASHIMOTO, A ;
FUKUNAGA, T ;
WATANABE, N .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (11) :5536-5541