SECONDARY ION MASS-SPECTROMETRIC IMAGE DEPTH PROFILE ANALYSIS OF THIN-LAYERS

被引：7

作者：

CHU, PK ^{[1
]}

HARRIS, WC ^{[1
]}

MORRISON, GH ^{[1
]}

机构：

[1] CORNELL UNIV,BAKER LAB,DEPT CHEM,ITHACA,NY 14853

来源：

关键词：

D O I：

10.1021/ac00250a017

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：2208 / 2210

页数：3

共 13 条

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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 275 - 284
[3] DIRECT DIGITIZATION SYSTEM FOR QUANTIFICATION IN ION MICROSCOPY
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MORRISON, GH
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[4] QUANTITATIVE ION-IMPLANTATION - THEORETICAL ASPECTS
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[J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1979, 30 (02): : 97 - 112
[5] GRIES WH, 1981, MIKROCHIM ACTA, V1, P335
[6] ION-IMPLANTED STANDARDS FOR SECONDARY ION MASS-SPECTROMETRIC DETERMINATION OF THE 1A-7A GROUP ELEMENTS IN SEMICONDUCTING MATRICES
LETA, DP
MORRISON, GH
[J]. ANALYTICAL CHEMISTRY, 1980, 52 (03) : 514 - 519
[7] MCHUGH JA, 1976, METHODS SURFACE ANAL
[8] MORRISON GH, 1975, ANAL CHEM, V47, pA932, DOI 10.1021/ac60361a006
[9] PANISH MB, 1980, SCIENCE, V20, P916
[10] SECONDARY ION MASS-SPECTROMETRIC IMAGE DEPTH PROFILING FOR 3-DIMENSIONAL ELEMENTAL ANALYSIS
PATKIN, AJ
MORRISON, GH
[J]. ANALYTICAL CHEMISTRY, 1982, 54 (01) : 2 - 5