OXYGEN PRECIPITATION AND MICRODEFECTS IN CZOCHRALSKI-GROWN SILICON-CRYSTALS

被引：26

作者：

YASUTAKE, K

UMENO, M

KAWABE, H

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1984年 / 83卷 / 01期

关键词：

D O I：

10.1002/pssa.2210830122

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：207 / 217

页数：11

共 39 条

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