THERMALLY ACTIVATED REVERSIBLE THRESHOLD SHIFTS IN YBA2CU3O7-DELTA/YTTRIA-STABILIZED ZIRCONIA/SI CAPACITORS

被引：7

作者：

QIAO, JM ^{[1
]}

AJIMINE, EM ^{[1
]}

PATEL, PP ^{[1
]}

GIESE, GL ^{[1
]}

YANG, CY ^{[1
]}

FORK, DK ^{[1
]}

机构：

[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 26期

关键词：

D O I：

10.1063/1.107953

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

YBa2Cu3O7-delta/yttria-stabilized zirconia (YSZ)/silicon superconductor-insulator-semiconductor capacitors are characterized with capacitance-voltage (C-V) measurements at different gate-voltage sweep rates and under bias-temperature cycling. It is shown that ionic conduction in YSZ causes both hysteresis and stretch-out in room-temperature C- V curves. A thermally activated process with an activation energy of about 39 meV in YSZ and/or at YSZ/Si interface is attributed to trapping/detrapping mechanisms in the SiOx interfacial layer between YSZ and Si. The negative mobile ions in YSZ can be moved by an applied electric field at room temperature and then ''frozen'' with decreasing temperature, giving rise to adjustable threshold voltages at low temperatures.

引用

页码：3184 / 3186

页数：3

共 12 条

[1] ELECTRICAL CHARACTERIZATION OF METAL-INSULATOR-SEMICONDUCTOR DIODES FABRICATED FROM LASER-ABLATED YBA2CU3O7-DELTA YTTRIA-STABILIZED ZIRCONIA FILMS ON SI SUBSTRATES
AJIMINE, EM
PAGADUAN, FE
RAHMAN, MM
YANG, CY
INOKAWA, H
FORK, DK
GEBALLE, TH
[J]. APPLIED PHYSICS LETTERS, 1991, 59 (22) : 2889 - 2891
[2] AJIMINE EM, 1992, 34TH EL MAT C CAMBR
[3] SUPERCONDUCTING PROPERTIES OF YBA2CU3O7-X THIN-FILMS DEPOSITED ON SILICON COVERED BY EPITAXIAL STABILIZED ZRO2
BRUYERE, JC
PLUTA, J
BRUNEL, M
MURET, P
SCHWEBEL, C
GAUTHERIN, G
[J]. JOURNAL OF THE LESS-COMMON METALS, 1989, 151 (1-2): : 429 - 433
[4] CONNELL GAN, 1990, MATER RES SOC SYMP P, V169, P485
[5] CHARACTERISTICS OF SURFACE-STATE CHARGE (QSS) OF THERMALLY OXIDIZED SILICON
DEAL, BE
SKLAR, M
GROVE, AS
SNOW, EH
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (03) : 266 - +
[6] DEDLOS SJ, 1989, COMMUN AM CERAM SOC, V72, P1500
[7] Buffer Layers for High-Quality Epitaxial YBCO Films on Si
Fork, David K.
Fenner, David B.
Barrera, Adrian
Phillips, Julia M.
Geballe, Theodore H.
Connell, G. A. N.
Boyce, James B.
[J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1991, 1 (01) : 67 - 73
[8] HIGH CRITICAL CURRENTS IN STRAINED EPITAXIAL YBA2CU3O7-DELTA ON SI
FORK, DK
FENNER, DB
BARTON, RW
PHILLIPS, JM
CONNELL, GAN
BOYCE, JB
GEBALLE, TH
[J]. APPLIED PHYSICS LETTERS, 1990, 57 (11) : 1161 - 1163
[9] WINDOW CLEANING AND FLUORINE INCORPORATION BY XEF2 IN PHOTOCHEMICAL VAPOR-DEPOSITION
LANGFORD, AA
BENDER, J
FLEET, ML
STAFFORD, BL
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (03): : 437 - 442
[10] HOT-CARRIER DETRAPPING MECHANISMS IN MOS DEVICES
PAGADUAN, FE
HAMADA, A
YANG, CY
TAKEDA, E
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (11): : L2047 - L2049

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