THE OPTICAL-PROPERTIES OF GEO2, ZNS AND GE FILMS PRODUCED BY RF-SPUTTERING

被引：17

作者：

BOHAC, P

JASTRABIK, L

CHVOSTOVA, D

ZELEZNY, V

机构：

[1] Institute of Physics ČSAV, Prague

来源：

VACUUM | 1990年 / 41卷 / 4-6期

关键词：

D O I：

10.1016/0042-207X(90)93992-R

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of GeO2, ZnS and Ge were deposited using rf magnetron sputtering with film thickness varying in broad range of values. After annealing, X-ray spectra reveal recrystallization of the GGeO2 films. The transmission measurements were conducted to determine the absorption coefficient α and the optical indices n and k. Tauc's plots were constructed to determine the optical gap for the GeO2 films. The values determined for the optical constants are in agreement with the results found in the literature. © 1990.

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页码：1466 / 1468

页数：3

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