PHASE FORMATION OF NIAL3 ON LATERAL DIFFUSION COUPLES

被引：34

作者：

LIU, JC ^{[1
]}

MAYER, JW ^{[1
]}

BARBOUR, JC ^{[1
]}

机构：

[1] SANDIA NATL LABS,ALBUQUERQUE,NM 87185

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 02期

关键词：

D O I：

10.1063/1.341956

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：651 / 655

页数：5

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共 13 条

[1] [Anonymous], ION BEAM SURFACE LAY
[2] CALIBRATION OF AN ENERGY DISPERSIVE SPECTROSCOPY K-FACTOR USING RUTHERFORD BACKSCATTERING
BARBOUR, JC
SICKAFUS, K
NASTASI, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (05): : 1895 - 1902
[3] CASTLEMAN LS, 1958, T AM I MIN MET ENG, V212, P589
[4] TRANSMISSION ELECTRON-MICROSCOPY STUDIES ON THE LATERAL GROWTH OF NICKEL SILICIDES
CHEN, SH
ZHENG, LR
CARTER, CB
MAYER, JW
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (02) : 258 - 263
[5] INITIAL PHASE FORMATION AND DISSOCIATION IN THE THIN-FILM NI/AL SYSTEM
COLGAN, EG
NASTASI, M
MAYER, JW
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (11) : 4125 - 4129
[6] DIFFUSION MARKERS IN AL/METAL THIN-FILM REACTIONS
COLGAN, EG
MAYER, JW
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 17 (03) : 242 - 249
[7] COLGAN EG, UNPUB
[8] GOLDSTEIN JI, 1979, INTRO ANAL ELECTRON, pCH3
[9] GROWTH-KINETICS OF PLANAR BINARY DIFFUSION COUPLES - THIN-FILM CASE VERSUS BULK CASES
GOSELE, U
TU, KN
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (04) : 3252 - 3260
[10] Hansen M., 1958, CONSTITUTION BINARY, P118