CHARACTERIZATION OF IMPLANTED AND EVAPORATED LAYERS BY RBS ANALYSIS

被引：13

作者：

MITCHELL, IV

MAENHAUT, W

RAEMDONCK, H

BODART, F

机构：

[1] STATE UNIV GHENT,INST NUCL SCI,B-9000 GHENT,BELGIUM

[2] FAC UNIV NAMUR,LARN,B-5000 NAMUR,BELGIUM

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 197卷 / 01期

关键词：

D O I：

10.1016/0167-5087(82)90117-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：51 / 57

页数：7

共 17 条

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