GASEOUS ION REACTIONS IN SIF4 AND SIF4-D2 MIXTURES

被引：12

作者：

SENZER, SN

LAMPE, FW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 06期

关键词：

D O I：

10.1063/1.332419

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：3524 / 3527

页数：4

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