GASEOUS ION REACTIONS IN SIF4 AND SIF4-D2 MIXTURES

被引：12

作者：

SENZER, SN

LAMPE, FW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 06期

关键词：

D O I：

10.1063/1.332419

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3524 / 3527

页数：4

共 42 条

[31]

Pedley J. B., 1972, COMPUTER ANAL THERMO

[32]

ROSENSTOCK HM, 1977, J PHYS CHEM REF D S1, V6

[33] GLOW-DISCHARGE PREPARATION OF AMORPHOUS HYDROGENATED SILICON FROM HIGHER SILANES [J].

SCOTT, BA ;

BRODSKY, MH ;

GREEN, DC ;

KIRBY, PB ;

PLECENIK, RM ;

SIMONYI, EE .

APPLIED PHYSICS LETTERS, 1980, 37 (08) :725-727

[34] IMPLICATIONS OF ION-MOLECULE REACTIONS OBSERVED IN SILANE FOR RECOIL SILICON ATOM STUDIES [J].

STEWART, GW ;

HENIS, JMS ;

GASPAR, PP .

JOURNAL OF CHEMICAL PHYSICS, 1973, 58 (03) :890-895

[35] ION-MOLECULE REACTIONS IN SILANE-METHANE MIXTURES [J].

STEWART, GW ;

HENIS, JMS ;

GASPAR, PP .

JOURNAL OF CHEMICAL PHYSICS, 1972, 57 (05) :1990-&

[36] REACTION-MECHANISMS OF THE RADIO-FREQUENCY GLOW-DISCHARGE DEPOSITION PROCESS IN SILANE-HELIUM [J].

TURBAN, G ;

CATHERINE, Y ;

GROLLEAU, B .

THIN SOLID FILMS, 1979, 60 (02) :147-155

[37] MASS-SPECTROMETRY OF A SILANE GLOW-DISCHARGE DURING PLASMA DEPOSITION OF A-SI-H FILMS [J].

TURBAN, G ;

CATHERINE, Y ;

GROLLEAU, B .

THIN SOLID FILMS, 1980, 67 (02) :309-320

[38] COLUTRON MARK 2 A VELOCITY FILTER ISOTOPE SEPARATOR [J].

WAHLIN, L .

NUCLEAR INSTRUMENTS & METHODS, 1965, 38 (DEC) :133-&

[39]

WEAKLIEM HA, 1980, 13TH P AIAA FLUID PL

[40]

Wien W., 1898, ANN PHYS, V65, P440

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