FABRICATION OF SINGLE-CRYSTAL DIAMOND MICROCOMPONENTS

被引：28

作者：

HUNN, JD ^{[1
]}

WITHROW, SP ^{[1
]}

WHITE, CW ^{[1
]}

CLAUSING, RE ^{[1
]}

HEATHERLY, L ^{[1
]}

CHRISTENSEN, CP ^{[1
]}

机构：

[1] POTOMAC PHOTON,LANHAM,MD 20705

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 24期

关键词：

D O I：

10.1063/1.112959

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have combined a technique for the lift-off of thin diamond films from a bulk diamond with a technique for engraving diamond with a focused excimer laser to produce free-standing single-crystal diamond microstructures. One microcomponent that has been produced is a 12 tooth gear ∼400 μm in diameter and ∼13 μm thick. Other microstructures have also been demonstrated, showing the versatility of this method. This process should be applicable to producing diamond microcomponents down to spatial dimensions (width and thickness) of a few micrometers. © 1994 American Institute of Physics.

引用

页码：3072 / 3074

页数：3

共 14 条

[11] SINGLE-CRYSTAL DIAMOND PLATE LIFTOFF ACHIEVED BY ION-IMPLANTATION AND SUBSEQUENT ANNEALING [J].