THE DEVELOPMENT OF SURFACE-MORPHOLOGY BY SPUTTER ETCHING OF STATIONARY AND MOVING SUBSTRATES

被引：2

作者：

CARTER, G

NOBES, MJ

CRUZ, SA

LEWIS, GW

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90480-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：840 / 845

页数：6

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