THEORY OF DEVELOPMENT OF SURFACE-TOPOGRAPHY UNDER SPATIOTEMPORALLY HETEROGENEOUS SPUTTERING CONDITIONS

被引：8

作者：

CARTER, G

NOBES, MJ

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1984年 / 2卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(84)90282-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：635 / 639

页数：5

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