A 2ND-ORDER EROSION SLOWNESS THEORY OF THE DEVELOPMENT OF SURFACE-TOPOGRAPHY BY ION-INDUCED SPUTTERING

被引:37
作者
CARTER, G
NOBES, MJ
WEBB, RP
机构
关键词
D O I
10.1007/BF00542369
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:2091 / 2102
页数:12
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