SI K X-RAY-ABSORPTION SPECTRA OF SINGLE-CRYSTAL SI AND AMORPHOUS SIO2

被引:16
作者
NAGASHIMA, N
NAKANO, A
OGATA, K
TAMURA, M
SUGAWARA, K
HAYAKAWA, K
机构
[1] HITACHI LTD,PROD ENGN RES LAB,YOKOHAMA 244,JAPAN
[2] HITACHI LTD,DIV SEMICOND & INTEGRATED CIRCUITS,KODAIRA,TOKYO 187,JAPAN
[3] HOKKAIDO UNIV,CATALYSIS RES CTR,SAPPORO,HOKKAIDO 060,JAPAN
来源
PHYSICAL REVIEW B | 1993年 / 48卷 / 24期
关键词
D O I
10.1103/PhysRevB.48.18257
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Fine structures near the Si K-absorption edges of single-crystal Si and amorphous SiO2 were measured for well-characterized films by a transmission method with a high-resolution double-crystal spectrometer. The spectrum of single-crystal Si was not affected by the changes of the angle between the polarization vector and the crystal axis. Both single-crystal Si and amorphous SiO2 showed strong absorption lines near the edges. Energies of the K-absorption edges were determined to be 1840.3 and 1846.1 eV for single-crystal Si and amorphous SiO2, respectively. The edge structure of single-crystal Si shows features related to the theoretical empty;conduction-band structure of Si. In amorphous SiO2, the strong absorption line can be interpreted in terms of the excitonic state.
引用
收藏
页码:18257 / 18260
页数:4
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