ION-BEAM MIXING OF METALLIC AND INSULATING LAYERS ON SIC AND SI3N4

[1] ION-IMPLANTATION, ION-BEAM MIXING, AND ANNEALING STUDIES OF METALS IN AL2O3, SIC AND SI3N4 [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 1 (2-3) : 167 - 175

[2] HIGH-TEMPERATURE CHEMICAL PHENOMENA AFFECTING SILICON-NITRIDE JOINTS [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1984, 67 (08) : 522 - 526

[3] FARLOW GD, 1985, MATER RES SOC S P, V45, P127

[4] HUBLER GK, 1984, ION IMPLANTATION ION

[5] Kubaschewski O, 1978, METALLURGICAL THERMO, P268

[6] MOORE TJ, 1985, J AM CERAM SOC, V68, pC151

[7] ION-BEAM AND LASER MIXING OF NICKEL OVERLAYERS ON SILICON-CARBIDE [J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (06) : 1577 - 1582

[8] ULRICH BM, 1985, ION BEAM MODIFICATIO

[1] ION-IMPLANTATION, ION-BEAM MIXING, AND ANNEALING STUDIES OF METALS IN AL2O3, SIC AND SI3N4 [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 1 (2-3) : 167 - 175

[2] HIGH-TEMPERATURE CHEMICAL PHENOMENA AFFECTING SILICON-NITRIDE JOINTS [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1984, 67 (08) : 522 - 526

[3] FARLOW GD, 1985, MATER RES SOC S P, V45, P127

[4] HUBLER GK, 1984, ION IMPLANTATION ION

[5] Kubaschewski O, 1978, METALLURGICAL THERMO, P268

[6] MOORE TJ, 1985, J AM CERAM SOC, V68, pC151

[7] ION-BEAM AND LASER MIXING OF NICKEL OVERLAYERS ON SILICON-CARBIDE [J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (06) : 1577 - 1582

[8] ULRICH BM, 1985, ION BEAM MODIFICATIO