DOPING PROFILE MEASUREMENTS FROM AVALANCHE SPACE-CHARGE RESISTANCE - NEW TECHNIQUE

被引:8
作者
GLOVER, GH [1 ]
TANTRAPORN, W [1 ]
机构
[1] GE,RES & DEV CTR,SCHENECTADY,NY 12301
关键词
D O I
10.1063/1.321605
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:867 / 874
页数:8
相关论文
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