EVALUATION OF IMPURITY AND CONTAMINATION LEVELS ON MICA SURFACES USING SSIMS

被引：30

作者：

DOWSETT, MG ^{[1
]}

KING, RM ^{[1
]}

PARKER, EHC ^{[1
]}

机构：

[1] CITY LONDON POLYTECH,DEPT PHYS,LONDON EC3N 2EY,ENGLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 02期

关键词：

D O I：

10.1116/1.569188

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：711 / 717

页数：7

共 19 条

[1]

Abdullayeva M. K., 1973, Radiation Effects, V19, P225, DOI 10.1080/00337577308232252

[2] THERMODYNAMIC APPROACH TO QUANTITATIVE INTERPRETATION OF SPUTTERED ION MASS-SPECTRA [J].

ANDERSEN, CA ;

HINTHORNE, JR .

ANALYTICAL CHEMISTRY, 1973, 45 (08) :1421-1438

[3] DEVELOPMENTS IN SECONDARY ION MASS-SPECTROSCOPY AND APPLICATIONS TO SURFACE STUDIES [J].

BENNINGHOVEN, A .

SURFACE SCIENCE, 1975, 53 (DEC) :596-625

[4] SURFACE INVESTIGATION OF SOLIDS BY STATICAL METHOD OF SECONDARY ION MASS SPECTROSCOPY (SIMS) [J].

BENNINGHOVEN, A .

SURFACE SCIENCE, 1973, 35 (01) :427-457

[5] ADSORPTION OF GASES STUDIED BY SECONDARY ION EMISSION MASS-SPECTROMETRY [J].

BLAISE, G ;

BERNHEIM, M .

SURFACE SCIENCE, 1975, 47 (01) :324-343

[6] NEW THEORY OF SIMS AT METAL-SURFACES [J].

CINI, M .

SURFACE SCIENCE, 1976, 54 (01) :71-78

[7] SPECTRAL INTERFERENCES IN SECONDARY ION MASS-SPECTROMETRY [J].

COLBY, BN ;

EVANS, CA .

APPLIED SPECTROSCOPY, 1973, 27 (04) :274-279

[8]

DEER, 1962, ROCK FORMING MINERAL, V3

[9] MODIFICATION OF EXISTING APPARATUS FOR SIMS IN UHV [J].

DOWSETT, MG ;

KING, RM ;

PARKER, EHC .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1975, 8 (08) :704-708

[10]

DOWSETT MG, THESIS

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