EVALUATION OF IMPURITY AND CONTAMINATION LEVELS ON MICA SURFACES USING SSIMS

被引：30

作者：

DOWSETT, MG ^{[1
]}

KING, RM ^{[1
]}

PARKER, EHC ^{[1
]}

机构：

[1] CITY LONDON POLYTECH,DEPT PHYS,LONDON EC3N 2EY,ENGLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 02期

关键词：

D O I：

10.1116/1.569188

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：711 / 717

页数：7

共 19 条

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[12]

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[16] QUANTUM-MECHANICAL MODEL FOR IONIZATION AND EXCITATION OF ATOMS DURING SPUTTERING [J].

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[18]

Staib P., 1973, Radiation Effects, V18, P217, DOI 10.1080/00337577308232125

[19]

TOWNSEND PD, 1976, ION IMPLANTATION SPU

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