MODIFICATION OF EXISTING APPARATUS FOR SIMS IN UHV

被引：10

作者：

DOWSETT, MG ^{[1
]}

KING, RM ^{[1
]}

PARKER, EHC ^{[1
]}

机构：

[1] CITY LONDON POLYTECH,DEPT PHYS,31 JEWRY ST,LONDON EC3N 2EY,ENGLAND

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1975年 / 8卷 / 08期

关键词：

D O I：

10.1088/0022-3735/8/8/025

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：704 / 708

页数：5

相关论文

共 10 条

[1] TANDEM MASS SPECTROMETER FOR SECONDARY ION STUDIES
BENNINGHOVEN, A
LOEBACH, E
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (01) : 49 - +
[2] SURFACE INVESTIGATION OF SOLIDS BY STATICAL METHOD OF SECONDARY ION MASS SPECTROSCOPY (SIMS)
BENNINGHOVEN, A
[J]. SURFACE SCIENCE, 1973, 35 (01) : 427 - 457
[3] COSSLETT VE, 1946, INTRO ELECTRON OPTIC, P62
[4] Dennis E., 1972, Radiation Effects, V13, P243, DOI 10.1080/00337577208231186
[5] ANALYTICAL SYSTEM FOR SECONDARY ION MASS-SPECTROMETRY IN ULTRA HIGH-VACUUM
HUBER, WK
SELHOFER, H
BENNINGH.A
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01): : 482 - &
[6] COMPARISON BETWEEN QUADRUPOLE AND MAGNETIC MASS SPECTROMETERS FOR USE IN SIM
RUDENAUER, FG
[J]. VACUUM, 1972, 22 (11) : 609 - 612
[7] SIMPLE, INEXPENSIVE SIMS APPARATUS
SCHUBERT, R
TRACY, JC
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (04) : 487 - 491
[8] SIMS WITH A STANDARD QUADRUPOLE RESIDUAL GAS ANALYZER
THOMAS, GE
KLUIZENA.EE
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1974, 45 (03) : 457 - 458
[9] INVESTIGATION OF SURFACE-LAYERS BY SIMS AND SIIMS
WERNER, HW
DEGREFTE, HA
[J]. SURFACE SCIENCE, 1973, 35 (01) : 458 - 472
[10] Wittmaack K., 1973, International Journal of Mass Spectrometry and Ion Physics, V11, P23, DOI 10.1016/0020-7381(73)80052-X