RANGE PROFILES OF MEDIUM AND HEAVY-IONS IMPLANTED INTO SIO2

被引：26

作者：

GRANDE, PL

FICHTNER, PFP

BEHAR, M

ZAWISLAK, FC

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 35卷 / 01期

关键词：

D O I：

10.1016/0168-583X(88)90093-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：17 / 20

页数：4

共 14 条

[1]

Biersack J.P., 1982, ION IMPLANTATION TEC, P122, DOI DOI 10.1007/978-3-642-68779-2_5

[2] NEW PROJECTED RANGE ALGORITHM AS DERIVED FROM TRANSPORT-EQUATIONS [J].

BIERSACK, JP .

ZEITSCHRIFT FUR PHYSIK A-HADRONS AND NUCLEI, 1982, 305 (02) :95-101

[3] EFFECTIVE STOPPING-POWER CHARGES OF SWIFT IONS IN CONDENSED MATTER [J].

BRANDT, W ;

KITAGAWA, M .

PHYSICAL REVIEW B, 1982, 25 (09) :5631-5637

[4]

CHU WK, 1988, BACKSCATTERING SPECT

[5] RANGE PROFILES OF 10 TO 390 KEV IONS (29-LESS-THAN-OR-EQUAL-TO-Z1-LESS-THAN-OR-EQUAL-TO-83) IMPLANTED INTO AMORPHOUS-SILICON [J].

FICHTNER, PFP ;

BEHAR, M ;

OLIVIERI, CA ;

LIVI, RP ;

DESOUZA, JP ;

ZAWISLAK, FC ;

BIERSACK, JP ;

FINK, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (04) :481-487

[6] PROJECTED RANGES AND RANGE STRAGGLINGS OF AU AND BI IMPLANTED INTO CARBON-FILMS AND INTO SIO2 [J].

GRANDE, PL ;

FICHTNER, PFP ;

BEHAR, M ;

LIVI, RP ;

ZAWISLAK, FC ;

BIERSACK, JP ;

FINK, D ;

MERTENS, P .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :25-27

[7] DESCRIPTION OF ARSENIC AND BORON PROFILES IMPLANTED IN SIO2,SI3N4 AND SI USING PEARSON DISTRIBUTIONS WITH 4 MOMENTS [J].

JAHNEL, F ;

RYSSEL, H ;

PRINKE, G ;

HOFFMANN, K ;

MULLER, K ;

BIERSACK, J ;

HENKELMANN, R .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :223-229

[8]

NAKATA J, 1952, JPN J APPL PHYS, V21, P1363

[9] DETERMINATION OF THE RANGE PROFILES OF BORON IMPLANTED INTO SI AND SIO2 [J].

RYBKA, V ;

HNATOWICZ, V ;

KVITEK, J ;

VACIK, J ;

SCHMIDT, B .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1984, 83 (01) :165-171

[10] ENERGY-LOSS OF HE-4 IONS IN AL2O3 AND SIO2 [J].

SANTRY, DC ;

WERNER, RD .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 14 (02) :169-172

← 1 2 →