FORMATION OF AMORPHOUS LAYERS IN AL2O3 BY ION-IMPLANTATION

被引：40

作者：

WHITE, CW

FARLOW, GC

MCHARGUE, CJ

SKLAD, PS

ANGELINI, MP

APPLETON, BR

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90415-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：473 / 478

页数：6

共 6 条

[1]

BURNETT PJ, UNPUB J MATER SCI

[2]

Farlow G. C., 1984, Ion Implantation and Ion Beam Processing of Materials. Proceedings of the Symposium, P395

[3]

McHargue C. J., 1984, Ion Implantation and Ion Beam Processing of Materials. Proceedings of the Symposium, P385

[4] ION-IMPLANTATION AND THERMAL ANNEALING OF ALPHA-AL2O3 SINGLE-CRYSTALS [J].

NARAMOTO, H ;

WHITE, CW ;

WILLIAMS, JM ;

MCHARGUE, CJ ;

HOLLAND, OW ;

ABRAHAM, MM ;

APPLETON, BR .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (02) :683-698

[5] NEAR-SURFACE MODIFICATION OF ALPHA-AL2O3 BY ION-IMPLANTATION FOLLOWED BY THERMAL ANNEALING [J].

NARAMOTO, H ;

MCHARGUE, CJ ;

WHITE, CW ;

WILLIAMS, JM ;

HOLLAND, OW ;

ABRAHAM, MM ;

APPLETON, BR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :1159-1166

[6]

White C. W., 1984, Defect Properties and Processing of High-Technology Nonmetallic Materials. Proceedings of the Symposium, P163

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